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Journal description
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Details for article 8 of 21 found articles
| Title: |
Diffusion of aluminum into silicon nitride films |
| Author: |
Ogata, H. Kanayama, K. Ohtani, M. Fujiwara, K. Abe, H. Nakayama, H. |
| Appeared in: |
Thin solid films |
| Paging: | Volume 48 (1978) nr. 3 pages 6 p. |
| Year: |
1978 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 8 of 21 found articles
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