|
Comparative evaluation of organic contamination sources from roller and pencil type PVA brushes during the Post-CMP cleaning process |
|
|
|
Titel: |
Comparative evaluation of organic contamination sources from roller and pencil type PVA brushes during the Post-CMP cleaning process |
Auteur: |
Lee, Jung-Hwan Poddar, Maneesh Kumar Han, Kwang-Min Ryu, Heon-Yul Yerriboina, Nagendra Prasad Kim, Tae-Gon Wada, Yutaka Hamada, Satomi Hiyama, Hirokuni Park, Jin-Goo |
Verschenen in: |
Polymer testing |
Paginering: |
Jaargang 90 () nr. C pagina's p. |
Jaar: |
2020 |
Inhoud: |
|
Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|