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Ultrasound-induced break-in method for an incoming polyvinyl acetal (PVA) brush used during post-CMP cleaning process |
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Titel: |
Ultrasound-induced break-in method for an incoming polyvinyl acetal (PVA) brush used during post-CMP cleaning process |
Auteur: |
Lee, Jung-Hwan Poddar, Maneesh Kumar Yerriboina, Nagendra Prasad Ryu, Heon-Yul Han, Kwang-Min Kim, Tae-Gon Hamada, Satomi Wada, Yutaka Hiyama, Hirokuni Park, Jin-Goo |
Verschenen in: |
Polymer testing |
Paginering: |
Jaargang 78 () nr. C pagina's p. |
Jaar: |
2019 |
Inhoud: |
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Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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