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Details for article 15 of 16 found articles
| Title: |
Optical thickness measurement of mask blank glass plate by the excess fraction method using a wavelength-tuning interferometer |
| Author: |
Kim, Yangjin Hibino, Kenichi Sugita, Naohiko Mitsuishi, Mamoru |
| Appeared in: |
Optics and lasers in engineering |
| Paging: | Volume 51 (2013) nr. 10 pages 6 p. |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 15 of 16 found articles
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