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                                       Details for article 18 of 28 found articles
 
 
  Non-integral depth measurement of high-aspect-ratio multi-layer microstructures using numerical-aperture shaped beams
 
 
Title: Non-integral depth measurement of high-aspect-ratio multi-layer microstructures using numerical-aperture shaped beams
Author: Chein, Wei-Hsin
Yang, Fu-Sheng
Thakur, Komal
Wu, Guo-Wei
Chen, Liang-Chia
Appeared in: Optics and lasers in engineering
Paging: Volume 166 () nr. C pages p.
Year: 2023
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 18 of 28 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands