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  Accuracy improvement of surface measurement through phase correction in spectrally resolved interferometer
 
 
Title: Accuracy improvement of surface measurement through phase correction in spectrally resolved interferometer
Author: Zhang, Mengsi
Wang, Zhiyuan
Luo, Songjie
Ji, XuanXuan
Chen, Ziyang
Pu, Jixiong
Appeared in: Optics and lasers in engineering
Paging: Volume 165 () nr. C pages p.
Year: 2023
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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