|
Surface topography measurement of microstructures near the lateral resolution limit via coherence scanning interferometry |
|
|
|
Titel: |
Surface topography measurement of microstructures near the lateral resolution limit via coherence scanning interferometry |
Auteur: |
Sun, Yifeng Gao, Zhishan Ma, Jianqiu Zhou, Juntao Xie, Pengfei Wang, Lingjie Lei, Lihua Fu, Yunxia Guo, Zhenyan Yuan, Qun |
Verschenen in: |
Optics and lasers in engineering |
Paginering: |
Jaargang 152 () nr. C pagina's p. |
Jaar: |
2022 |
Inhoud: |
|
Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|