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                                       Details for article 63 of 96 found articles
 
 
  Optical sensor design for fast and process-robust position measurements on small diffraction gratings
 
 
Title: Optical sensor design for fast and process-robust position measurements on small diffraction gratings
Author: Gödecke, Maria Laura
Bett, Claudia Monika
Buchta, Dominic
Frenner, Karsten
Osten, Wolfgang
Appeared in: Optics and lasers in engineering
Paging: Volume 134 () nr. C pages p.
Year: 2020
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 63 of 96 found articles
 
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