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Journal description
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Details for article 63 of 96 found articles
| Title: |
Optical sensor design for fast and process-robust position measurements on small diffraction gratings |
| Author: |
Gödecke, Maria Laura Bett, Claudia Monika Buchta, Dominic Frenner, Karsten Osten, Wolfgang |
| Appeared in: |
Optics and lasers in engineering |
| Paging: | Volume 134 () nr. C pages p. |
| Year: |
2020 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 63 of 96 found articles
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