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Journal description
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Details for article 14 of 15 found articles
| Title: |
Study on the mechanism of ultrasonic-assisted water confined laser micromachining of silicon |
| Author: |
Zhou, Jia Xu, Rongwei Jiao, Hui Bao, Jia-ding Liu, Qing-yuan Long, Yu-hong |
| Appeared in: |
Optics and lasers in engineering |
| Paging: | Volume 132 () nr. C pages p. |
| Year: |
2020 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 14 of 15 found articles
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