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                                       Details for article 22 of 38 found articles
 
 
  Laser-induced frontside etching of silicon using 1550-nm nanosecond laser pulses
 
 
Title: Laser-induced frontside etching of silicon using 1550-nm nanosecond laser pulses
Author: Lai, Shengying
Lorenz, Pierre
Ehrhardt, Martin
Han, Bing
Hirsch, Dietmar
Zagoranskiy, Igor
Lu, Jian
Zimmer, Klaus
Appeared in: Optics and lasers in engineering
Paging: Volume 122 (2019) nr. C pages 245-253
Year: 2019
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 22 of 38 found articles
 
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