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                                       Details for article 6 of 27 found articles
 
 
  Effects of precursor aging and post-deposition treatment time on photo-assisted sol–gel derived low-dielectric constant SiO2 thin film on Si
 
 
Title: Effects of precursor aging and post-deposition treatment time on photo-assisted sol–gel derived low-dielectric constant SiO2 thin film on Si
Author: Cheong, K.Y.
Jasni, F.A.
Appeared in: Microelectronics journal
Paging: Volume 38 () nr. 2 pages 227-230
Year: 2007
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 6 of 27 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands