|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 11 of 15 found articles
| Title: |
NIL—a low-cost and high-throughput MEMS fabrication method compatible with IC manufacturing technology |
| Author: |
Fan, Xiqiu Zhang, Honghai Liu, Sheng Hu, Xiaofeng Jia, Ke |
| Appeared in: |
Microelectronics journal |
| Paging: | Volume 37 () nr. 2 pages 121-126 |
| Year: |
2006 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 11 of 15 found articles
| << previous | next >> |