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Journal description
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Details for article 18 of 19 found articles
| Title: |
Theoretical study of mechanical properties of multi-layer ULSI interconnect dielectrics by surface acoustic wave method |
| Author: |
Xiao, Xia You, Xueyi Yao, Suying |
| Appeared in: |
Microelectronics journal |
| Paging: | Volume 37 (2006) nr. 10 pages 4 p. |
| Year: |
2006 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 18 of 19 found articles
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