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                                       Details for article 8 of 11 found articles
 
 
  Generation lifetime improvement on MOS capacitor by fast neutron enhanced intrinsic gettering technique
 
 
Title: Generation lifetime improvement on MOS capacitor by fast neutron enhanced intrinsic gettering technique
Author: Uen, Wu-Yih
Lan, Shan-Ming
Liao, Sen-Mao
Chiou, Jing-Ting
Appeared in: Microelectronics journal
Paging: Volume 34 () nr. 2 pages 127-131
Year: 2003
Contents:
Publisher: Elsevier Science Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 8 of 11 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands