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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
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Details for article 4 of 10 found articles
| Title: |
Modelling and simulations for 40nm lines/spaces in 1μm Shipley SPR510A resist using PRIME process |
| Author: |
Arshak, K Arshak, A Mihov, M McDonagh, D |
| Appeared in: |
Microelectronics journal |
| Paging: | Volume 32 () nr. 8 pages 687-697 |
| Year: |
2001 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 10 found articles
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