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                                       Details for article 6 of 13 found articles
 
 
  Effects of rapid thermal annealing in vacuum on electrical properties of thin Ta2O5–Si structures
 
 
Title: Effects of rapid thermal annealing in vacuum on electrical properties of thin Ta2O5–Si structures
Author: Spassov, D.
Atanassova, E.
Beshkov, G.
Appeared in: Microelectronics journal
Paging: Volume 31 () nr. 8 pages 653-661
Year: 2000
Contents:
Publisher: Elsevier Science Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 6 of 13 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands