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Journal description
All volumes of the corresponding journal
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All articles of the corresponding issues
Details for article 13 of 14 found articles
| Title: |
Structural and mechanical characterization of in-situ phosphorus-doped rapid transport low pressure chemical vapor deposition polycrystalline silicon films |
| Author: |
Kallel, S. Semmache, B. Lemiti, M. Jaffrezic, H. Laugier, A. |
| Appeared in: |
Microelectronics journal |
| Paging: | Volume 30 () nr. 7 pages 699-703 |
| Year: |
1999 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 13 of 14 found articles
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