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Journal description
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Details for article 3 of 26 found articles
| Title: |
A microstructure for detecting the stress distribution in thin coatings deposited on to silicon substrates |
| Author: |
Keatch, Robert P. Lawrenson, Brian |
| Appeared in: |
Microelectronics journal |
| Paging: | Volume 25 () nr. 5 pages 393-400 |
| Year: |
1994 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 3 of 26 found articles
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