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                                       Details for article 15 of 50 found articles
 
 
  Electron beam/optical hybrid lithography for the production of gallium arsenide monolithic microwave integrated circuits (MIMICs)
 
 
Title: Electron beam/optical hybrid lithography for the production of gallium arsenide monolithic microwave integrated circuits (MIMICs)
Author:
Appeared in: Microelectronics journal
Paging: Volume 20 (1989) nr. 4 pages 1 p.
Year: 1989
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 15 of 50 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands