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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 4 of 11 found articles
| Title: |
Computation of optical image profile for lithography and linewidth measurement |
| Author: |
Kundu, N.N. Mathur, B.P. Gupta, S.N. |
| Appeared in: |
Microelectronics journal |
| Paging: | Volume 17 () nr. 6 pages 14-23 |
| Year: |
1986 |
| Contents: | |
| Publisher: |
Benn Electronics Publications Ltd, Luton |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 11 found articles
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