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Journal description
All volumes of the corresponding journal
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All articles of the corresponding issues
Details for article 1 of 29 found articles
| Title: |
Amorphous BN films produced in a double-plasma reactor for semiconductor applications |
| Author: | |
| Appeared in: |
Microelectronics journal |
| Paging: | Volume 17 () nr. 5 pages 41 |
| Year: |
1986 |
| Contents: | |
| Publisher: |
Benn Electronics Publications Ltd. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 29 found articles
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