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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
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Details for article 40 of 56 found articles
| Title: |
Profile control in plasma etching of SiO2 |
| Author: | |
| Appeared in: |
Microelectronics journal |
| Paging: | Volume 16 () nr. 6 pages 57 |
| Year: |
1985 |
| Contents: | |
| Publisher: |
Benn Electronics Publications Ltd, Luton |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 40 of 56 found articles
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