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                                       Details for article 44 of 53 found articles
 
 
  The influence of hydrogen gas on the characteristics of amorphous silicon deposited by RF sputtering
 
 
Title: The influence of hydrogen gas on the characteristics of amorphous silicon deposited by RF sputtering
Author:
Appeared in: Microelectronics journal
Paging: Volume 15 () nr. 4 pages 62
Year: 1984
Contents:
Publisher: Benn Electronics Publications Ltd, Luton
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 44 of 53 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands