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  A bibliography on silicon nitride films
 
 
Title: A bibliography on silicon nitride films
Author:
Appeared in: Microelectronics journal
Paging: Volume 13 () nr. 6 pages 41
Year: 1982
Contents:
Publisher: Benn Electronics Publications Limited, Luton
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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 Koninklijke Bibliotheek - National Library of the Netherlands