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                                       Details for article 34 of 34 found articles
 
 
  Theoretical and numerical investigation of a new 3-axis SU-8 MEMS piezoresistive accelerometer
 
 
Title: Theoretical and numerical investigation of a new 3-axis SU-8 MEMS piezoresistive accelerometer
Author: Khlifi, Awatef
Ahmed, Aftab
Mezghani, Brahim
Patkar, Rajul
Dixit, Pradeep
Tounsi, Fares
Baghini, Maryam Shojaei
Appeared in: Microelectronics journal
Paging: Volume 128 () nr. C pages p.
Year: 2022
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 34 of 34 found articles
 
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