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                                       Details for article 16 of 17 found articles
 
 
  Structure design and optimization of SOI high-temperature pressure sensor chip
 
 
Title: Structure design and optimization of SOI high-temperature pressure sensor chip
Author: Tang, Xin
Tian, Junwang
Zhao, Jiafeng
Jin, Zhong
Liu, Yunpeng
Liu, Junfu
Chen, Taotao
Li, Junhui
Appeared in: Microelectronics journal
Paging: Volume 118 () nr. C pages p.
Year: 2021
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 16 of 17 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands