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Journal description
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Details for article 16 of 65 found articles
| Title: |
Effect of fabrication process on fracture strength and fatigue life of micromirrors made from single-crystal silicon |
| Author: |
Xia, Yuanlin Suzuki, Makoto Xue, Peidong Hirai, Yoshikazu Tsuchiya, Toshiyuki |
| Appeared in: |
International journal of fatigue |
| Paging: | Volume 162 () nr. C pages p. |
| Year: |
2022 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 16 of 65 found articles
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