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  Polymers in electron beam and X-Ray lithography
 
 
Title: Polymers in electron beam and X-Ray lithography
Author: Schnabel, Wolfram
Sotobayashi, Hideto
Appeared in: Progress in polymer science
Paging: Volume 9 (1983) nr. 4 pages 69 p.
Year: 1983
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 1 of 1 found articles
 
 Koninklijke Bibliotheek - National Library of the Netherlands