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Journal description
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Details for article 19 of 21 found articles
| Title: |
Structural effect on intrinsic stress in nanocrystalline Si:H films |
| Author: |
Wei, Wensheng Su, Jianling Zhang, Congliang Chu, Liang Wang, Tianmin |
| Appeared in: |
Vacuum |
| Paging: | Volume 86 (2011) nr. 2 pages 5 p. |
| Year: |
2011 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 19 of 21 found articles
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