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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
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Details for article 4 of 29 found articles
| Title: |
Development of large diameter ECR plasma source |
| Author: |
Kawai, Yoshinobu Uchino, Kiichiro Muta, Hiroshi Kawai, Shinji Röwf, Tobias |
| Appeared in: |
Vacuum |
| Paging: | Volume 84 (2010) nr. 12 pages 4 p. |
| Year: |
2010 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 29 found articles
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