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Journal description
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Details for article 20 of 29 found articles
| Title: |
Measurement for dissociation ratio of source gases in plasmas using a quartz sensor |
| Author: |
Suzuki, Atsushi Nonaka, Hidehiko |
| Appeared in: |
Vacuum |
| Paging: | Volume 84 (2010) nr. 12 pages 4 p. |
| Year: |
2010 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 20 of 29 found articles
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