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Journal description
All volumes of the corresponding journal
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Details for article 7 of 16 found articles
| Title: |
Ion energy distribution of an inductively coupled radiofrequency discharge in argon and oxygen |
| Author: |
Hippler, Rainer Kredl, Jana Vartolomei, Vasile |
| Appeared in: |
Vacuum |
| Paging: | Volume 83 (2008) nr. 4 pages 6 p. |
| Year: |
2008 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 7 of 16 found articles
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