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Journal description
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Details for article 1 of 27 found articles
| Title: |
Applicability of self-consistent global model for characterization of inductively coupled Cl2 plasma |
| Author: |
Efremov, A.M. Kim, Gwan-Ha Kim, Jong-Gyu Bogomolov, A.V. Kim, Chang-Il |
| Appeared in: |
Vacuum |
| Paging: | Volume 81 (2007) nr. 5 pages 7 p. |
| Year: |
2007 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 27 found articles
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