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Dual DC magnetron cathode co-deposition of (Al,Ti) and (Al,Ti,N) thin films with controlled depth composition |
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Titel: |
Dual DC magnetron cathode co-deposition of (Al,Ti) and (Al,Ti,N) thin films with controlled depth composition |
Auteur: |
Nunes, Y. Wemans, A. Marques, H.P. Marques, C. Ferreira, Q. Teodoro, O.M.N.D. Alves, E. Maneira, M.J.P. |
Verschenen in: |
Vacuum |
Paginering: |
Jaargang 81 (2007) nr. 11-12 pagina's 4 p. |
Jaar: |
2007 |
Inhoud: |
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Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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