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Journal description
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Details for article 14 of 23 found articles
| Title: |
Influence of hot wire on the formation of microcrystalline silicon in MWECR–CVD system |
| Author: |
Xiu-Hong, Zhu Guang-Hua, Chen Yi, Ding Zhan-Jie, Ma Guo-Han, Liu Wen-Li, Zhang Bin, He Zhi-Hua, Gao Zhi-Zhong, Li |
| Appeared in: |
Vacuum |
| Paging: | Volume 80 (2006) nr. 5 pages 5 p. |
| Year: |
2006 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 14 of 23 found articles
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