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Journal description
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Details for article 29 of 51 found articles
| Title: |
Photoresist ashing in nitrogen gas using ferrite core inductively coupled plasmas |
| Author: |
Kim, Hyoun Woo Myung, Ju Hyun Kim, Nam Ho Chung, Chin Wook Park, Wan Jae Kang, Chang-Jin Yoo, Chung-Gon Choi, Dae-Kyu |
| Appeared in: |
Vacuum |
| Paging: | Volume 80 (2005) nr. 1-3 pages 5 p. |
| Year: |
2005 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 29 of 51 found articles
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