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Deposition of nanostructured metal coatings on the modified silicon surfaces in the magnetoplasma compressor |
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Title: |
Deposition of nanostructured metal coatings on the modified silicon surfaces in the magnetoplasma compressor |
Author: |
Astashynski, V.M. Ananin, S.I. Askerko, V.V. Kostyukevich, E.A. Kuzmitski, A.M. Uglov, V.V. Cherenda, N.N. Anishchik, V.M. Sveshnikov, Yu.V. Astashynski, V.V. Kvasov, N.T. Danilyuk, A.L. Punko, A.V. Pauleau, Y. |
Appeared in: |
Vacuum |
Paging: |
Volume 78 (2005) nr. 2-4 pages 4 p. |
Year: |
2005 |
Contents: |
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Publisher: |
Elsevier Ltd |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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