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                                       Details for article 42 of 69 found articles
 
 
  Measurement of crystal orientation and residual stress in GaN film deposited by RF sputtering with powder target
 
 
Title: Measurement of crystal orientation and residual stress in GaN film deposited by RF sputtering with powder target
Author: Kusaka, K.
Hanabusa, T.
Tominaga, K.
Appeared in: Vacuum
Paging: Volume 74 (2004) nr. 3-4 pages 6 p.
Year: 2004
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 42 of 69 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands