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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
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Details for article 28 of 69 found articles
| Title: |
Highly moisture-resistive silicon nitride films prepared by catalytic chemical vapor deposition and application to gallium arsenide field-effect transistors |
| Author: |
Masuda, Atsushi Totsuka, Masahiro Oku, Tomoki Hattori, Ryo Matsumura, Hideki |
| Appeared in: |
Vacuum |
| Paging: | Volume 74 (2004) nr. 3-4 pages 5 p. |
| Year: |
2004 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 28 of 69 found articles
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