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Journal description
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Details for article 22 of 69 found articles
| Title: |
Enhancement of reactive species density in nitrogen plasma by mixture of helium and nitridation experiment for silicon |
| Author: |
Hino, T. Yamauchi, Y. Ono, J. Hirohata, Y. |
| Appeared in: |
Vacuum |
| Paging: | Volume 74 (2004) nr. 3-4 pages 5 p. |
| Year: |
2004 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 22 of 69 found articles
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