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Journal description
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Details for article 13 of 21 found articles
| Title: |
Optimization of PECVD silicon oxynitride films for anti-reflection coating |
| Author: |
Wang, Yongjin Cheng, Xinli Lin, Zhilang Zhang, Changsheng Zhang, Feng |
| Appeared in: |
Vacuum |
| Paging: | Volume 72 (2003) nr. 3 pages 5 p. |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 13 of 21 found articles
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