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Journal description
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Details for article 12 of 17 found articles
| Title: |
Patterning of Ru electrode in O2/Cl2 gas using reactive ion etcher |
| Author: |
Kim, Hyoun Woo Ju, Byong-Sun Kang, Chang-Jin |
| Appeared in: |
Vacuum |
| Paging: | Volume 71 (2003) nr. 4 pages 6 p. |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 12 of 17 found articles
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