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Journal description
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Details for article 51 of 66 found articles
| Title: |
Reactive ion etching of novel materials—GaN and SiC |
| Author: |
Szczęsny, A. Śniecikowski, P. Szmidt, J. Werbowy, A. |
| Appeared in: |
Vacuum |
| Paging: | Volume 70 (2003) nr. 2-3 pages 249-254 |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 51 of 66 found articles
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