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  Dy–Ni alloy metal ion source for focused ion beam implantation
 
 
Title: Dy–Ni alloy metal ion source for focused ion beam implantation
Author: Melnikov, A
Hillmann, M
Kamphausen, I
Oswald, W
Stauche, P
Wernhardt, R
Wieck, A.D
Appeared in: Vacuum
Paging: Volume 67 (2002) nr. 2 pages 3 p.
Year: 2002
Contents:
Publisher: Elsevier Science Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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