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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 47 of 58 found articles
| Title: |
Preparation of TiO2 thin films by sputtering applying electron cyclotron resonance plasma produced in arched magnetic mirrors |
| Author: |
Honbo, E Miyata, M Ueno, T Kato, Y Ishii, S |
| Appeared in: |
Vacuum |
| Paging: | Volume 66 (2002) nr. 3-4 pages 5 p. |
| Year: |
2002 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 47 of 58 found articles
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