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Journal description
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Details for article 37 of 58 found articles
| Title: |
Large area electron-beam-excited plasma of meter size for industrial applications |
| Author: |
Homyara, H Ahmad, S Ikezawa, S Baba, K Yoshioka, T Ninomiya, Y Nakamura, K Famakinwa, T Oda, H Yoshimura, K Taoda, H Fujii, S Hara, T |
| Appeared in: |
Vacuum |
| Paging: | Volume 66 (2002) nr. 3-4 pages 5 p. |
| Year: |
2002 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 37 of 58 found articles
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