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Journal description
All volumes of the corresponding journal
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Details for article 35 of 58 found articles
| Title: |
In situ monitoring of plasma parameters in the afterglow region of ECR sputtering system for tribological coatings |
| Author: |
Lungu, C.P Iwasaki, K |
| Appeared in: |
Vacuum |
| Paging: | Volume 66 (2002) nr. 3-4 pages 6 p. |
| Year: |
2002 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 35 of 58 found articles
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