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                                       Details for article 5 of 13 found articles
 
 
  Formation of 3D islands of metal oxides on silicon covered by native oxide film by multi-step ion sputtering of Ti, Nb and V
 
 
Title: Formation of 3D islands of metal oxides on silicon covered by native oxide film by multi-step ion sputtering of Ti, Nb and V
Author: Sushkova, N.M
Akimov, A.G
Appeared in: Vacuum
Paging: Volume 56 (2000) nr. 4 pages 5 p.
Year: 2000
Contents:
Publisher: Elsevier Science B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 5 of 13 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands