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  Angular dependences of surface composition, sputtering and ripple formation on silicon under N2 + ion bombardment
 
 
Title: Angular dependences of surface composition, sputtering and ripple formation on silicon under N2 + ion bombardment
Author: Bachurin, V.I
Lepshin, P.A
Smirnov, V.K
Appeared in: Vacuum
Paging: Volume 56 (2000) nr. 4 pages 5 p.
Year: 2000
Contents:
Publisher: Elsevier Science Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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