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                                       Details for article 31 of 75 found articles
 
 
  Influence of He, Ne and Kr addition in reactive Ar/N2 dc magnetron plasma on TiN deposition
 
 
Title: Influence of He, Ne and Kr addition in reactive Ar/N2 dc magnetron plasma on TiN deposition
Author: Braic, M.
Zoita, C.N.
Braic, V.
Kiss, A.
Popescu, M.
Musa, G.
Appeared in: Vacuum
Paging: Volume 53 (1999) nr. 1-2 pages 5 p.
Year: 1999
Contents:
Publisher: Elsevier Science Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 31 of 75 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands